Inherently Robust Micromachined Gyroscopes With 2-DOF Sense-Mode Oscillator
Acar, C., Shkel, A.M.Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2006.872224
Date:
April, 2006
File:
PDF, 2.22 MB
english, 2006