Novel Capacitive Pressure Sensor

Journal of Microelectromechanical Systems 2010 / 06 Vol. 19; Iss. 3

Novel Capacitive Pressure Sensor

Bakhoum, Ezzat G, Cheng, Marvin H M
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2047632
Date:
June, 2010
File:
PDF, 424 KB
english, 2010
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