An axially symmetric finite element model for the...

IEEE Transactions on Magnetics 1993 / Nov. Vol. 29; Iss. 6

An axially symmetric finite element model for the electromagnetic behaviour of an RF plasma device

Mekideche, M.R., Feliachi, M.
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Volume:
29
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.280978
Date:
January, 1993
File:
PDF, 222 KB
english, 1993
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