SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco,...

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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Micromachining and Microfabrication Process Technology XVIII - High quality surface micromachining of LiNbO 3 by ion implantation-assisted etching

Sugliani, Simone, De Nicola, Pietro, Montanari, Giovanni Battista, Nubile, Alessio, Menin, Angela, Mancarella, Fulvio, Vergani, Paolo, Meroni, Andrea, Astolfi, Marco, Borsetto, Marco, Consonni, Guido,
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Volume:
8612
Year:
2013
Language:
english
DOI:
10.1117/12.2002095
File:
PDF, 6.63 MB
english, 2013
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