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Modeling-Simulation and Analysis of MEMS Capacitive Millibar Pressure Sensor
Manoharan, P. A., Nedumaran, D.Volume:
1
Year:
2010
Language:
english
Journal:
Journal of Nanotechnology in Engineering and Medicine
DOI:
10.1115/1.4002320
File:
PDF, 1.61 MB
english, 2010