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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A membrane type Si-MEMS tactile imager with fingerprint structure for realization of slip sensing capability
Okada, Hiroki, Yawata, Masaki, Ishida, Makoto, Sawada, Kazuaki, Takao, HidekuniYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442333
File:
PDF, 1.40 MB
english, 2010