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CMOS MEMS capacitive absolute pressure sensor
Narducci, M, Yu-Chia, L, Fang, W, Tsai, JVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/5/055007
Date:
May, 2013
File:
PDF, 941 KB
english, 2013