Effects of abrasive size distribution in chemical...

IEEE Transactions on Semiconductor Manufacturing 2003 / 08 Vol. 16; Iss. 3

Effects of abrasive size distribution in chemical mechanical planarization: Modeling and verification

Jianfeng Luo,, Dornfeld, D.A.
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Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2003.815199
Date:
August, 2003
File:
PDF, 656 KB
english, 2003
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