A silicon resonant sensor structure for Coriolis mass-flow...

A silicon resonant sensor structure for Coriolis mass-flow measurements

Enoksson, P., Stemme, G., Stemme, E.
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Volume:
6
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.585789
Date:
June, 1997
File:
PDF, 164 KB
english, 1997
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