Piezoelectric Al1−xScxN thin films: A semiconductor...

Applied Physics Letters 2013 Vol. 102; Iss. 15

Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

Matloub, R., Hadad, M., Mazzalai, A., Chidambaram, N., Moulard, G., Sandu, C. S., . Metzger, Th, Muralt, P.
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Volume:
102
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4800231
File:
PDF, 1.29 MB
english, 2013
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