Recirculating-Planar-Magnetron Simulations and Experiment

IEEE Transactions on Plasma Science 2013 / 04 Vol. 41; Iss. 4

Recirculating-Planar-Magnetron Simulations and Experiment

Franzi, Matthew A., Gilgenbach, Ronald M., Hoff, Brad W., Chalenski, David A., Simon, David, Lau, Y. Y., Luginsland, John
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Volume:
41
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2013.2242493
Date:
April, 2013
File:
PDF, 850 KB
english, 2013
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