Structural, mechanical and tribological characterizations of a-C : H : Si films prepared by a hybrid PECVD and sputtering technique
Zhao, F, Li, H X, Ji, L, Mo, Y F, Quan, W L, Zhou, H D, Chen, J MVolume:
42
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/42/16/165407
Date:
August, 2009
File:
PDF, 2.32 MB
english, 2009