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Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures
Hildreth, Owen James, Lin, Wei, Wong, Ching PingVolume:
3
Language:
english
Journal:
ACS Nano
DOI:
10.1021/nn901174e
Date:
December, 2009
File:
PDF, 537 KB
english, 2009