In situ tuning of a MEMS microphone using...

Journal of Micromechanics and Microengineering 2009 / 03 Vol. 19; Iss. 3

In situ tuning of a MEMS microphone using electrodeposited nanostructures

Je, Sang-Soo, Harrison, Jere C, Kozicki, Michael N, Bakkaloglu, Bertan, Kiaei, Sayfe, Chae, Junseok
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Volume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/3/035015
Date:
March, 2009
File:
PDF, 1.33 MB
english, 2009
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