Formation of iridium silicides from Ir thin films on Si...

Journal of Applied Physics 1979 Vol. 50; Iss. 5

Formation of iridium silicides from Ir thin films on Si substrates

Petersson, S., Baglin, J., Hammer, W., d’Heurle, F., Kuan, T. S., Ohdomari, I., de Sousa Pires, J., Tove, P.
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Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.326325
File:
PDF, 948 KB
english, 1979
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