Fabrication and Characterization of Three-Dimensional...

Journal of Microelectromechanical Systems 2006 / 10 Vol. 15; Iss. 5

Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass

Orhan, J.-B., Parashar, V.K., Sayah, A., Gijs, M.A.M.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2006.879696
Date:
October, 2006
File:
PDF, 1.80 MB
english, 2006
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