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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Nonlinear model of open-loop mode capacitive micro-accelerometer
Dai, Qiang, Shi, Xiufen, Han, Chun, Yang, MohuaYear:
2006
Language:
english
DOI:
10.1109/ICSICT.2006.306393
File:
PDF, 186 KB
english, 2006