Nanopatterning using a simple bi-layer lift-off process for the fabrication of a photonic crystal nanostructure
Mao, A, Schaper, C D, Karlicek Jr, R FVolume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/8/085302
Date:
March, 2013
File:
PDF, 1.14 MB
english, 2013