A highly sensitive pressure sensor using a Au-patterned...

Journal of Micromechanics and Microengineering 2013 / 02 Vol. 23; Iss. 2

A highly sensitive pressure sensor using a Au-patterned polydimethylsiloxane membrane for biosensing applications

Liu, Xinchuan, Zhu, Yihao, Nomani, Md W, Wen, Xuejun, Hsia, Tain-Yen, Koley, Goutam
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025022
Date:
February, 2013
File:
PDF, 1.47 MB
english, 2013
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