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Atomic Layer Deposition of Titanium Oxide from TiI4 and H2O2
K. Kukli, M. Ritala, M. Schuisky, M. Leskelä, T. Sajavaara, J. Keinonen, T. Uustare, A. HårstaVolume:
6
Year:
2000
Language:
english
Pages:
8
DOI:
10.1002/1521-3862(200011)6:63.0.co;2-j
File:
PDF, 534 KB
english, 2000