Atomic Layer Deposition of Titanium Oxide from TiI4 and...

Atomic Layer Deposition of Titanium Oxide from TiI4 and H2O2

K. Kukli, M. Ritala, M. Schuisky, M. Leskelä, T. Sajavaara, J. Keinonen, T. Uustare, A. Hårsta
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Volume:
6
Year:
2000
Language:
english
Pages:
8
DOI:
10.1002/1521-3862(200011)6:63.0.co;2-j
File:
PDF, 534 KB
english, 2000
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