Plasma-Assisted MOCVD Growth of Superconducting NbN Thin...

Chemical Vapor Deposition 2001 Vol. 7; Iss. 1

Plasma-Assisted MOCVD Growth of Superconducting NbN Thin Films Using Nb Dialkylamide and Nb Alkylimide Precursors

X. Liu, J. R. Babcock, M. A. Lane, J. A. Belot, A. W. Ott, M. V. Metz, C. R. Kannewurf, R. P. H. Chang, T. J. Marks
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Volume:
7
Year:
2001
Language:
english
Pages:
4
DOI:
10.1002/1521-3862(200101)7:13.0.co;2-o
File:
PDF, 508 KB
english, 2001
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