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Measurement of electron energy distribution in low-pressure RF discharges
Godyak, V A, Piejak, R B, Alexandrovich, B MVolume:
1
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/1/1/006
Date:
March, 1992
File:
PDF, 1.57 MB
english, 1992