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Static Vapor Pressure Measurement of Low Volatility Precursors for Molecular Vapor Deposition Below Ambient Temperature
T. Ohta, F. Cicoira, P. Doppelt, L. Beitone, P. HoffmannVolume:
7
Year:
2001
Language:
english
Pages:
5
DOI:
10.1002/1521-3862(200101)7:13.0.co;2-y
File:
PDF, 347 KB
english, 2001