[IEEE 2011 Materials for Advanced Metallization (MAM) -...

  • Main
  • [IEEE 2011 Materials for Advanced...

[IEEE 2011 Materials for Advanced Metallization (MAM) - Dresden, Germany (2011.05.8-2011.05.12)] 2011 IEEE International Interconnect Technology Conference - Strain measurement for the semiconductor industry with nm-scale resolution by dark field electron holography and nanobeam electron diffraction

Cooper, D., Beche, A., Hartmann, J.M., Carron, V., Rouviere, J-L
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2011
Language:
english
DOI:
10.1109/IITC.2011.5940278
File:
PDF, 5.51 MB
english, 2011
Conversion to is in progress
Conversion to is failed