Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor–Strontium-bis(tri-isopropyl cyclopentadienyl)
M. Vehkamäki, T. Hänninen, M. Ritala, M. Leskelä, T. Sajavaara, E. Rauhala, J. KeinonenVolume:
7
Year:
2001
Language:
english
Pages:
6
DOI:
10.1002/1521-3862(200103)7:23.0.co;2-b
File:
PDF, 451 KB
english, 2001