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The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film
Klabunde, F., LoÌhmann, M., BlaÌsing, J., DruÌsedau, T.Volume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363702
File:
PDF, 2.99 MB
english, 1996