Dual Patterning of a Poly(acrylic acid) Layer by...

Dual Patterning of a Poly(acrylic acid) Layer by Electron-Beam and Block Copolymer Lithographies

Pearson, Anthony C., Linford, Matthew R., Harb, John N., Davis, Robert C.
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Volume:
29
Language:
english
Journal:
Langmuir
DOI:
10.1021/la304486x
Date:
June, 2013
File:
PDF, 878 KB
english, 2013
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