Stress reduction in tungsten films using nanostructured...

Journal of Applied Physics 2004 Vol. 96; Iss. 10

Stress reduction in tungsten films using nanostructured compliant layers

Karabacak, Tansel, Picu, Catalin R., Senkevich, Jay. J., Wang, Gwo-Ching, Lu, Toh-Ming
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Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1803106
File:
PDF, 792 KB
english, 2004
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