Fabrication of Silicon Nanowires with Precise Diameter...

Chemistry of Materials 2010 / 07 Vol. 22; Iss. 13

Fabrication of Silicon Nanowires with Precise Diameter Control Using Metal Nanodot Arrays as a Hard Mask Blocking Material in Chemical Etching

Huang, Jinquan, Chiam, Sing Yang, Tan, Hui Huang, Wang, Shijie, Chim, Wai Kin
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Volume:
22
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm101121c
Date:
July, 2010
File:
PDF, 3.01 MB
english, 2010
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