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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Deposition of high k ZrO/sub 2/ thin films by high vacuum electron beam evaporation at room temperature
Ninglin Zhang,, Qing Wan,, Zhitang Song,, Qinwo Shen,, Chenglu Lin,Volume:
1
Year:
2001
Language:
english
DOI:
10.1109/ICSICT.2001.981486
File:
PDF, 287 KB
english, 2001