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The affinity of Si–N and Si–C bonding in amorphous silicon carbon nitride (a-SiCN) thin film
Chen, C.W., Huang, C.C., Lin, Y.Y., Chen, L.C., Chen, K.H.Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.10.045
Date:
March, 2005
File:
PDF, 405 KB
english, 2005