The affinity of Si–N and Si–C bonding in amorphous silicon...

Diamond and Related Materials 2005 / 3 Vol. 14; Iss. 3-7

The affinity of Si–N and Si–C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

Chen, C.W., Huang, C.C., Lin, Y.Y., Chen, L.C., Chen, K.H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.10.045
Date:
March, 2005
File:
PDF, 405 KB
english, 2005
Conversion to is in progress
Conversion to is failed