[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Oxide thickness determination by XPS, AES, SIMS, RBS and TEM
Shallenberger, J.R., Cole, D.A., Novak, S.W., Moore, R.L., Edgell, M.J., Smith, S.P., Hitzman, C.J., Kirchhoff, J.F., Principe, E., Biswas, S., Bleiler, R.J., Nieveen, W., Jones, K.Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/IIT.1999.812056
File:
PDF, 382 KB
english, 1998