Development of texture in TiN films by use of in situ synchrotron x-ray scattering
Schell, N., Matz, W., Bøttiger, J., Chevallier, J., Kringhøj, P.Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1436558
File:
PDF, 477 KB
english, 2002