[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - USJ metrology : from 0D to 3D analysis.
Vandervorst, Wilfried, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799376
File:
PDF, 1.51 MB
english, 2007