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SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Influence of substrate rotating on the microstructure and surface morphology of Ge and Si thin films
Luo, Haihan, Liu, Dingquan, Yin, Xin, Yang, Li, Ruch, Eric, Li, ShengyiVolume:
8416
Year:
2012
Language:
english
DOI:
10.1117/12.971477
File:
PDF, 665 KB
english, 2012