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Achieving consistency of Youngâs modulus determination from nanoscale deformation of low-k films
Nagao, S., Fujikane, M., Tymiak, N., Nowak, R.Volume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3117526
File:
PDF, 594 KB
english, 2009