Sensitive Gas Analysis System on a Microchip and...

Sensitive Gas Analysis System on a Microchip and Application for On-Site Monitoring of NH 3 in a Clean Room

Hiki, Shinichiro, Mawatari, Kazuma, Aota, Arata, Saito, Maki, Kitamori, Takehiko
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Volume:
83
Language:
english
Journal:
Analytical Chemistry
DOI:
10.1021/ac200884z
Date:
June, 2011
File:
PDF, 3.70 MB
english, 2011
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