The physics of plasma-enhanced chemical vapour deposition for large-area coating: industrial application to flat panel displays and solar cells
Perrin, Jérôme, Schmitt, Jacques, Hollenstein, Christoph, Howling, Alan, Sansonnens, LaurentVolume:
42
Language:
english
Journal:
Plasma Physics and Controlled Fusion
DOI:
10.1088/0741-3335/42/12B/326
Date:
December, 2000
File:
PDF, 291 KB
english, 2000