A Compact Angular Rate Sensor System Using a Fully...

Journal of Microelectromechanical Systems 2008 / 12 Vol. 17; Iss. 6

A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope

Alper, Said Emre, Temiz, Yuksel, Akin, Tayfun
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2008.2007274
Date:
December, 2008
File:
PDF, 2.17 MB
english, 2008
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