Deposition of NCD films using hot filament CVD and...

Diamond and Related Materials 2006 / 2 Vol. 15; Iss. 2-3

Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures

May, P.W., Smith, J.A., Mankelevich, Yu. A.
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Volume:
15
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.06.044
Date:
February, 2006
File:
PDF, 290 KB
english, 2006
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