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Corrugated silicon nitride membranes as suspensions in micromachined silicon accelerometers
Lapadatu, Daniel, Pyka, Andrzej, Dziuban, Jan, Puers, RobertVolume:
6
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/6/1/016
Date:
March, 1996
File:
PDF, 666 KB
english, 1996