An all-silicon single-wafer micro-g accelerometer with a...

Journal of Microelectromechanical Systems 2000 / 12 Vol. 9; Iss. 4

An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

Yazdi, N., Najafi, K.
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Volume:
9
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.896777
Date:
December, 2000
File:
PDF, 275 KB
english, 2000
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