SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Microfluidics, BioMEMS, and Medical Microsystems III - Comparison of glass processing using high-repetition femtosecond (800 nm) and UV (255 nm) nanosecond pulsed lasers
Karnakis, Dimitris M., Knowles, Martyn R. H., Alty, Kevin T., Schlaf, Martin, Snelling, Howard V., Papautsky, Ian, Chartier, IsabelleVolume:
5718
Year:
2005
Language:
english
DOI:
10.1117/12.588194
File:
PDF, 1.16 MB
english, 2005