![](/img/cover-not-exists.png)
Process for the fabrication of hollow core solenoidal microcoils in borosilicate glass
Klein, Mona J K, Ono, Takahito, Esashi, Masayoshi, Korvink, Jan GVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/7/075002
Date:
July, 2008
File:
PDF, 945 KB
english, 2008