![](/img/cover-not-exists.png)
[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Three-dimensional simulation of the deep UV light intensity distribution in SU-8 photorsists
Feng, Ming, Hang, Qing-an, Li, Wei-hua, Zhou, Zai-fa, Zhu, ZhenYear:
2006
DOI:
10.1109/ICSICT.2006.306430
File:
PDF, 152 KB
2006