A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography
Dinachali, Saman Safari, Saifullah, Mohammad S. M., Ganesan, Ramakrishnan, Thian, Eng San, He, ChaobinVolume:
23
Language:
english
Journal:
Advanced Functional Materials
DOI:
10.1002/adfm.201202577
Date:
May, 2013
File:
PDF, 1.90 MB
english, 2013