Silicide formation in the Ta/Ti/Si system by reaction of codeposited Ta and Ti with Si (100) and Si (111) substrates
Pelleg, Joshua, Goldshleger, N.Volume:
85
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.369283
File:
PDF, 467 KB
english, 1999