[IEEE Seventh International IEEE Conference on VLSI Multilevel Interconnection - Santa Clara, CA, USA (12-13 June 1990)] Seventh International IEEE Conference on VLSI Multilevel Interconnection - Sub-atmospheric chemical vapor deposition (SACVD) of TEOS-ozone USG and BPSG
Lee, P., Galiano, M., Keswick, P., Wong, J., Shin, B., Wang, D.Year:
1990
Language:
english
DOI:
10.1109/VMIC.1990.127910
File:
PDF, 319 KB
english, 1990