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Mechanism of the Smart Cut⢠layer transfer in silicon by hydrogen and helium coimplantation in the medium dose range
Nguyen, Phuong, Cayrefourcq, I., Bourdelle, K. K., Boussagol, A., Guiot, E., Ben Mohamed, N., Sousbie, N., Akatsu, T.Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1865318
File:
PDF, 639 KB
english, 2005