Improvements in the angular current density of inductively coupled plasma ion source for focused heavy ion beams
Menon, Ranjini, Nabhiraj, P.Y., Bhandari, R.K.Volume:
97
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.04.008
Date:
November, 2013
File:
PDF, 626 KB
english, 2013